Overview: The Carleton University MicroFabrication Facility is a 3200ft2 cleanroom facility used for manufacturing silicon integrated circuits and other device materials in support of research on: process technology, device physics/modeling, innovative circuit techniques, photonics, biomedical devices, renewable energy (solar cells) and micro-electromechanical systems (MEMS).
Faculty: Engineering Department: Electronics
Centre Capacity: Our cleanroom facility (class 100 – 10,000) in the Minto Center for Advanced Studies in Engineering building contains a wide variety of standard silicon microfabrication equipment and wetbenches. Our lab is divided into four distinct areas : photolithography, photomask generation, furnace operations, and high vacuum processes.
- Faculty Co-ordinator: Professor Garry Tarr
- Facility/Operations Manager: Rob Vandusen
- Lab technician : Angela McCormick
- Equipment Technician: Richard Adams
Focus: Microelectronics, Microfabrication, Cleanroom research space.
Project Examples which have been produced: Silicon based photonic and lighting devices, Bio-medical devices, small scale solar cell device research, thin film coatings.
Engagement types and co-funding
- R&D partnerships (up to 80% funding available through grants)
- Contract research and consulting
- For-fee tool /lab use
- Industrial-partnered student internships (up to 50% funding available through grants)