Science Capability

Overview: Using atomic layer deposition (ALD) and thermal evaporation thin film deposition tools, FANSSI can fabricate precisely controlled films and nanoparticles of a wide variety of materials (ex: gold and other noble metals), in thicknesses from a few Ångströms to several microns. 

Centre Capacity: Housed in a 600 ft2, ISO 6 – 7 (class 1,000 – 10,000) clean room: ALD and COVAP thermal evaporation tools are available. Supported by a wet-lab with a thermogravimetric analyzer in an inert-gas glovebox.


  • Director: Professor Seán Barry
  • Operations Manager: Peter Gordon
  • Postdoctoral Fellows, PhD students and Masters students

Industrial Application

Focus:  Microelectronics, Microfabrication, Solid State Lighting, Optics and Displays, Minting and Coins, Watches and Jewelry, Medical Equipment, Batteries, Catalysts, Phosphors.

Project Examples: Anti-tarnish and anti-wear coatings, gas sensors, ALD precursor development, volatility and stability analysis of metal-organic precursors.

Engagement types and co-funding

  • R&D partnerships (up to 80% cash contributions available)
  • Contract research and consulting
  • For-fee tool use
  • Industrial-partnered student internships (up to 50% cash contributions available) 

Point of Contact: Jeff Smirle, Business Manager- Faculty of Science; 613-875-1355


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Contact Information

Jeff Smirle, Business Manager- Faculty of Science;
Phone: 613-875-1355


Facility Details