Facility for Nanoscience, Surfaces and Sensor Interfaces (FANSSI)

Science Capability

Overview

Using atomic layer deposition (ALD) and thermal evaporation thin film deposition tools, FANSSI can fabricate precisely controlled films and nanoparticles of a wide variety of materials (ex: gold and other noble metals), in thicknesses from a few Ångströms to several microns. 

Centre Capacity

Housed in a 600 ft², ISO 6 – 7 (class 1,000 – 10,000) clean room: ALD and COVAP thermal evaporation tools are available. Supported by a wet-lab with a thermogravimetric analyzer in an inert-gas glovebox.

Personnel

• Director: Professor Seán Barry
• Operations Manager: Peter Gordon
• Postdoctoral Fellows, PhD students and Masters students

Industrial Application

Focus

Microelectronics, Microfabrication, Solid State Lighting, Optics and Displays, Minting and Coins, Watches and Jewelry, Medical Equipment, Batteries, Catalysts, Phosphors.

Project Examples

Anti-tarnish and anti-wear coatings, gas sensors, ALD precursor development, volatility and stability analysis of metal-organic precursors.

Engagement types and co-funding

• R&D partnerships (up to 80% cash contributions available)
• Contract research and consulting
• For-fee tool use
• Industrial-partnered student internships (up to 50% cash contributions available) 

Point of Contact

Jeff Smirle, Business Manager- Faculty of Science; 613-875-1355

Website